A REVIEW OF SUB-MICRON DEVICE MODELING

被引：0

作者：

CHATTERJEE, PK ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C100 / C100

页数：1

共 50 条

[1] CONCEPTUAL PROBLEMS IN MODELING SUB-MICRON DEVICE PHYSICS
GRUBIN, HL
FERRY, DK
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03): : 540 - 544
[2] DEVICE MODELING FOR SUB-MICRON FET INTEGRATED-CIRCUITS
CHATTERJEE, PK
[J]. IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1982, 5 (01): : 122 - 126
[3] MICRON AND SUB-MICRON LITHOGRAPHY FOR VLSI DEVICE FABRICATION
VARNELL, GL
[J]. SCANNING ELECTRON MICROSCOPY, 1981, : 343 - 350
[4] DEVICE, CIRCUIT, AND TECHNOLOGY SCALING TO MICRON AND SUB-MICRON DIMENSIONS
REISMAN, A
[J]. PROCEEDINGS OF THE IEEE, 1983, 71 (05) : 550 - 565
[5] METHODOLOGY FOR SUB-MICRON DEVICE MODEL DEVELOPMENT
MARASH, V
DUTTON, RW
[J]. IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 1988, 7 (02) : 299 - 306
[6] METHOD FOR MODELING THE NOISE OF SUB-MICRON DEVICES
NOUGIER, JP
GONTRAND, C
VAISSIERE, JC
[J]. PHYSICA B & C, 1985, 129 (1-3): : 580 - 582
[7] PROJECTION DEVICE FOR OBTAINING SUB-MICRON FILM ELEMENTS
ZAKHAROV, VI
KOLESNIKOV, DP
NIKITIN, AV
[J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1979, 22 (06) : 1642 - 1644
[8] PHYSICAL MODELS FOR DEEP SUB-MICRON DEVICE SIMULATION
SONODA, K
INOUE, Y
TANIGUCHI, K
HAMAGUCHI, C
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12): : L2313 - L2315
[9] ION PROJECTION MICROLITHOGRAPHY FOR SUB-MICRON DEVICE FABRICATION
STENGL, G
KAITNA, R
LOSCHNER, H
RIEDER, R
WOLF, P
SACHER, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1164 - 1165
[10] SUB SUB-MICRON TURNING
GETTELMAN, K
[J]. MODERN MACHINE SHOP, 1984, 56 (11) : 50 - 55

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