CONCEPTUAL PROBLEMS IN MODELING SUB-MICRON DEVICE PHYSICS

被引：3

|

作者：

GRUBIN, HL ^{[1
]}

FERRY, DK ^{[1
]}

机构：

[1] COLORADO STATE UNIV,FT COLLINS,CO 80521

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571122

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：540 / 544

页数：5

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