CONCEPTUAL PROBLEMS IN MODELING SUB-MICRON DEVICE PHYSICS

被引：3
|
作者：
GRUBIN, HL [1 ]
FERRY, DK [1 ]
机构：
[1] COLORADO STATE UNIV,FT COLLINS,CO 80521
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
关键词：
D O I：
10.1116/1.571122
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：540 / 544
页数：5
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