Growth and characterization of hard nitrides films prepared by pulsed laser deposition

被引：0
|
作者：
Inturi, RB [1 ]
Kumar, A [1 ]
Ekanayake, U [1 ]
Shu, N [1 ]
Barnard, JA [1 ]
机构：
[1] UNIV S ALABAMA,DEPT ELECT ENGN,MOBILE,AL 36688
来源：
POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II | 1996年 / 403卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：283 / 290
页数：8
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