Magnetic and structural properties of NdFeB thin film prepared by step annealing

被引:7
|
作者
Serrona, LKEB
Sugimura, A
Fujisaki, R
Okuda, T
Adachi, N
Ohsato, H
Sakamoto, I
Nakanishi, A
Motokawa, M
机构
[1] Nagoya Inst Technol, Showa Ku, Nagoya, Aichi 4668555, Japan
[2] Sumitomo Special Met Co, Osaka 6180013, Japan
[3] Tohoku Univ, Mat Res Inst, Sendai, Miyagi 9808577, Japan
关键词
RF sputtering; anisotropic NdFeB thin film; vacuum annealing; high coercivity;
D O I
10.1016/S0921-5107(02)00401-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The crystallization of the amorphous phase into the tetragonal Nd2Fe14B (Phi) phase and the corresponding changes in magnetic properties have been examined by step annealing experiment using a 2 mum thick NdFeB film sample. Microstructural and magnetic analysis indicate that the film was magnetically soft as deposited with the coercivity H-ciperpendicular to < 16 kA m(-1) and the remnant magnetization 4piM(rperpendicular to) < 0.02 T. Annealing at a temperature of 550 degreesC, a coercivity value around 784 kA m(-1) was developed and diffraction analysis showed evidence of Phi phase 0021 peaks being aligned perpendicular to the film plane. At an optimum annealing temperature of 575 degreesC, the remnant magnetization of this anisotropic thin film is around 0.60 T with intrinsic coercivity of similar to 1340 kA m(-1). Annealing the film sample at 200 degreesC less than or equal to T-ann less than or equal to 750 degreesC showed variations in magnetic properties that were mostly due to the change in the perpendicular anisotropy. Based on 4piM(sperpendicular to) values plotted against T-ann, a dip in 4piM(sperpendicular to) values was observed as T-ann increased in the soft-to-hard magnetic characteristics transition region and rose as the hard crystalline phase started to form. The results show that the magnetic properties of the NdFeB film were slightly influenced by the presence of NdO, film surface roughening and the small increase in crystal size as a consequence of repeated heat treatment. At T-ann similar to 300 degreesC, the nominal saturation magnetization indicated a certain degree of weak perpendicular magnetic anisotropy in the film sample considered to be essential in the enhancement of coercivity in crystallized films. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:59 / 63
页数:5
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