Diffusion mechanism study of arsenic in SiO2 using oxygen isotope 18O as a component element of matrix SiO2

被引：1
|
作者：
Tsunashima, Y [1 ]
Aoki, N [1 ]
机构：
[1] Toshiba Co Ltd, Microelect Engn Lab, Isogo Ku, Yokohama, Kanagawa 235, Japan
来源：
INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST | 1997年
关键词：
D O I：
10.1109/IEDM.1997.650479
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The diffusion mechanism of arsenic (As) in SiO2 was studied by the diffusion of oxygen in SiO2 using isotope O-18 as a component element of the matrix oxide. The result suggests that As loosens SiO2 network bonds and drives a subsequent rearrangement of the network which enhances diffusion of As and oxygen in N-2 annealing. However 10% H-2 was added in N-2, As atoms were released from the network as a molecular form and were completely independent from the network rearrangement.
引用
收藏
页码：699 / 702
页数：4
相关论文
共 50 条
  • [41] ARSENIC PILEUP AT THE SIO2/SI INTERFACE
    SATO, Y
    NAKATA, J
    IMAI, K
    ARAI, E
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (02) : 655 - 660
  • [42] Mechanism of photoluminescence of Si nanocrystals fabricated in a SiO2 matrix
    Zhuravlev, KS
    Gilinsky, AM
    Kobitsky, AY
    APPLIED PHYSICS LETTERS, 1998, 73 (20) : 2962 - 2964
  • [43] ARSENIC-RELATED DEFECTS IN SIO2
    ALEXANDROVA, S
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (03) : 1514 - 1518
  • [44] Photoluminescence mechanism of Si nanocrystals embedded in SiO2 matrix
    Wang, Xiaoxin
    Cheng, Buwen
    Yu, Jinzhong
    Wang, Qiming
    2006 3RD IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, 2006, : 158 - +
  • [45] Charging mechanism in a SiO2 matrix embedded with Si nanocrystals
    Liu, Y.
    Chen, T.P.
    Ding, L.
    Zhang, S.
    Fu, Y.Q.
    Fung, S.
    Journal of Applied Physics, 2006, 100 (09):
  • [46] Charging mechanism in a SiO2 matrix embedded with Si nanocrystals
    Liu, Y.
    Chen, T. P.
    Ding, L.
    Zhang, S.
    Fu, Y. Q.
    Fung, S.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (09)
  • [47] Nanocomposites SnO2/SiO2:SiO2 Impact on the Active Centers and Conductivity Mechanism
    Gulevich, Dayana
    Rumyantseva, Marina
    Marikutsa, Artem
    Shatalova, Tatyana
    Konstantinova, Elizaveta
    Gerasimov, Evgeny
    Gaskov, Alexander
    MATERIALS, 2019, 12 (21)
  • [48] Thermoluminescent mechanism of natural SiO2
    Takami, A
    Yasuda, M
    Ohta, M
    GEOCHIMICA ET COSMOCHIMICA ACTA, 2003, 67 (18) : A471 - A471
  • [49] Study of the Au/SiO2
    Ukleev, V. A.
    Grigorieva, N. A.
    Vorobiev, A. A.
    Grigoriev, S. V.
    Lutsev, L. V.
    Dyadkina, E. A.
    Lott, D.
    Stognii, A. I.
    Novitsky, N. N.
    PHYSICS OF PARTICLES AND NUCLEI LETTERS, 2011, 8 (10) : 1054 - 1055
  • [50] CATHODOLUMINESCENCE STUDY OF SIO2
    KOYAMA, H
    JOURNAL OF APPLIED PHYSICS, 1980, 51 (04) : 2228 - 2235
12345