Crystal structure and dielectric properties of radio frequency magnetron sputtered nanocrystalline SrTiO3 thin films

Nanocrystalline SrTiO3 thin films have been successfully deposited by radio frequency (RF) magnetron sputtering. The perovskite phase was obtained for the SrTiO3 thin films deposited on Pt/Ti/SiO2/Si substrates at 500degreesC. The SrTiO3 thin films deposited at 500degreesC were composed of granular crystallites with a size of approximately 35 nm and a thickness of 150 nm. The crystallite size increases with increasing film thickness. The dielectric constant of SrTiO3 thin films decreases with decreasing film thickness by changing the temperature, frequency and bias voltage.