CVD;
diamond;
electron emission;
nitrogen;
vacuum microelectronics;
D O I:
10.1109/55.877201
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
A nitrogen (N)-doped diamond-based electron emitter has been fabricated by the sintering technique prior to the chemical vapor deposition process in order to improve the uniformity. There are no spatial difference in reflective electron energy loss spectrum (REELS) from the diamond-based electron emitter, suggesting that the uniform surface conditions are obtained, The uniform electron emission from the obtained electron emitter is confirmed through the emission current vs anode voltage characteristics measurements. It seems that the uniformity of the emitter surface results in the uniform electron emission from the diamond electron emitter.
机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Univ Queensland, Sch Engn, ARC Ctr Excellence Funct Nanomat, Brisbane, Qld 4072, Australia
Univ Queensland, Australia Inst Bioengn & Nanotechnol, Brisbane, Qld 4072, AustraliaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Liu, Gang
Li, Feng
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机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Li, Feng
Wang, Da-Wei
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机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Wang, Da-Wei
Tang, Dai-Ming
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机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Tang, Dai-Ming
Liu, Chang
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机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Liu, Chang
Ma, Xiuliang
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机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Ma, Xiuliang
Lu, Gao Qing
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h-index: 0
机构:
Univ Queensland, Sch Engn, ARC Ctr Excellence Funct Nanomat, Brisbane, Qld 4072, Australia
Univ Queensland, Australia Inst Bioengn & Nanotechnol, Brisbane, Qld 4072, AustraliaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Lu, Gao Qing
Cheng, Hui-Ming
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机构:
Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China