RESEARCH ON THE HIGH FABRICATION ERROR IMMUNITY OF THE HONEYCOMB-LIKE DISK RESONATOR GYROSCOPE

The paper proposes a theory of how does structural design affect the fabrication error immunity (FEI) of the mode-matched MEMS disk resonator gyroscope (DRG). Based on the theory, a novel honeycomb-like disk resonator (HDRG) with high FEI is designed and tested. The theory prediction coincides well with the results of finite element simulation and statistical experiments. Furthermore, the performances of the honeycomb-like disk resonator gyroscope are preliminarily tested. The Allan deviation bias stability of the honeycomb-like disk resonator gyroscope under room temperature and without any compensation is about 8.9 degrees/h. The angle random walk can be calculated as 0.3 degrees/root h.