RESEARCH ON THE HIGH FABRICATION ERROR IMMUNITY OF THE HONEYCOMB-LIKE DISK RESONATOR GYROSCOPE

被引：0

作者：

Li, Qingsong ^{[1
]}

Xiao, Dingbang ^{[1
]}

Zhou, Xin ^{[1
]}

Hou, Zhanqiang ^{[1
]}

Xu, Yi ^{[1
]}

Hu, Qian ^{[1
]}

Wu, Xuezhong ^{[1
]}

机构：

[1] Natl Univ Def Technol, Changsha 410073, Hunan, Peoples R China

来源：

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年

基金：

中国国家自然科学基金;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper proposes a theory of how does structural design affect the fabrication error immunity (FEI) of the mode-matched MEMS disk resonator gyroscope (DRG). Based on the theory, a novel honeycomb-like disk resonator (HDRG) with high FEI is designed and tested. The theory prediction coincides well with the results of finite element simulation and statistical experiments. Furthermore, the performances of the honeycomb-like disk resonator gyroscope are preliminarily tested. The Allan deviation bias stability of the honeycomb-like disk resonator gyroscope under room temperature and without any compensation is about 8.9 degrees/h. The angle random walk can be calculated as 0.3 degrees/root h.

引用

页码：1016 / 1019

页数：4

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