HONEYCOMB-LIKE DISK RESONATOR WITH HIGH IMMUNITY TO FABRICATION ERROR FOR GYROSCOPIC APPLICATION

被引：0

作者：

Xiao, Dingbang ^{[1
]}

Zhou, Xin ^{[1
]}

Li, Qingsong ^{[1
]}

Hou, Zhanqiang ^{[1
]}

Wu, Yulie ^{[1
]}

Li, Wei ^{[1
]}

Wang, Xinghua ^{[1
]}

Zhang, Jinying ^{[2
,3
]}

Wu, Xuezhong ^{[1
]}

机构：

[1] Natl Univ Def Technol, Changsha, Hunan, Peoples R China

[2] Chinese Acad Sci, Univ Chinese Acad Sci, Inst Semicond, Beijing, Peoples R China

[3] State Key Lab Transducer Technol, Shanghai, Peoples R China

来源：

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) | 2017年

基金：

中国国家自然科学基金;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant frequency which results in superiorities in robustness to the environment disturbance and mechanical resolution.

引用

页码：1126 / 1129

页数：4

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