Diamond planar refractive lenses for third- and fourth-generation X-ray sources

被引：66
|
作者：
Nöhammer, B [1 ]
Hoszowska, J
Freund, AK
David, C
机构：
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
[2] European Synchrotron Radiat Facil, F-38043 Grenoble, France
来源：
JOURNAL OF SYNCHROTRON RADIATION | 2003年 / 10卷
关键词：
X-ray optics; focusing; X-ray free-electron lasers; reactive-ion etching;
D O I：
10.1107/S0909049502019532
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The fabrication and testing of planar refractive hard X-ray lenses made from bulk CVD diamond substrates is reported. The lens structures were generated by electron-beam lithography and transferred by reactive-ion etching into the diamond. Various lens designs were fabricated and tested at 12.4 and 17.5 keV photon energy. Efficiencies of up to 71% and gains of up to 26 were achieved. A line focus of 3.2 mum (FWHM) was measured. These lenses should be able to withstand the extreme flux densities expected at the planned fourth-generation X-ray sources.
引用
收藏
页码：168 / 171
页数：4
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