Stability study of all-permanent-magnet electron cyclotron resonance ion source

被引:1
|
作者
Yoshida, K. [1 ]
Nara, T. [1 ]
Saitoh, Y. [1 ]
Yokota, W. [1 ]
机构
[1] Japan Atom Energy Agcy, Takasaki Adv Radiat Res Inst, Takasaki, Gunma 3701292, Japan
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 02期
关键词
ion sources; plasma radiofrequency heating; plasma sources;
D O I
10.1063/1.3277193
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Beam intensity fluctuation was investigated using an electron cyclotron resonance ion source of an all-permanent-magnet type under development for highly stable beam intensity. While the source achieved a stability of better than 3.2% by strict regulation of the coolant temperature change within +/- 0.1 degrees C, the intensity varies strongly with intentional changes in the temperature of the plasma chamber coolant. The influence of the temperature on chamber expansion, magnetic field strength, and vacuum was measured or estimated in detail. The result shows that a slight change in vacuum and magnetic field strength has considerable influence on the intensity fluctuation.
引用
收藏
页数:4
相关论文
共 50 条
  • [21] A simple electron cyclotron resonance ion source
    Welton, RF
    Moran, TF
    Feeney, RK
    Thomas, EW
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (04): : 1634 - 1637
  • [22] A simple electron cyclotron resonance ion source
    Welton, RF
    Moran, TF
    Feeney, RK
    Thomas, EW
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1216 - 1216
  • [23] Electron cyclotron resonance negative ion source
    Fukumasa, O
    Matsumori, M
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02): : 935 - 938
  • [24] CU DEPOSITION USING A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SOURCE
    BERRY, LA
    GORBATKIN, SM
    RHOADES, RL
    [J]. THIN SOLID FILMS, 1994, 253 (1-2) : 382 - 385
  • [25] Initial comparative performances of conventional "surface" and "volume" type, all-permanent-magnet, ECR ion sources
    Liu, Y
    Alton, GD
    Bilheux, H
    Cole, JM
    Meyer, FW
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (05): : 1436 - +
  • [26] Design and investigations of the superconducting magnet system for the multipurpose superconducting electron cyclotron resonance ion source
    Tinschert, K.
    Lang, R.
    Maeder, J.
    Rossbach, J.
    Spaedtke, P.
    Komorowski, P.
    Meyer-Reumers, M.
    Krischel, D.
    Fischer, B.
    Ciavola, G.
    Gammino, S.
    Celona, L.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (02):
  • [27] Manufacturing of a superconducting magnet system for 28 GHz electron cyclotron resonance ion source at KBSI
    Lee, B. S.
    Choi, S.
    Yoon, J. H.
    Park, J. Y.
    Won, M. S.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (02):
  • [28] Study of the Characteristics of a 2.45 GHz Electron Cyclotron Resonance Ion Source
    K. Berestov
    S. Bogomolov
    K. Kuzmenkov
    [J]. Physics of Particles and Nuclei Letters, 2023, 20 : 1246 - 1249
  • [29] A preliminary study of the electron cyclotron resonance ion source for the RAON injector
    Hong, I. S.
    Kim, Y.
    Choi, S. J.
    Heo, J. I.
    Jin, H. C.
    Park, B. S.
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2016, 69 (06) : 953 - 956
  • [30] A preliminary study of the electron cyclotron resonance ion source for the RAON injector
    I. S. Hong
    Y. Kim
    S. J. Choi
    J. I. Heo
    H. C. Jin
    B. S. Park
    [J]. Journal of the Korean Physical Society, 2016, 69 : 953 - 956