Acoustic microscopy with resolution in the nm-range

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作者
Rabe, U [1 ]
Janser, K [1 ]
Arnold, W [1 ]
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[1] FRAUNHOFER INST NONDESTRUCT TESTING,D-66123 SAARBRUCKEN,GERMANY
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O42 [声学];
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070206 ; 082403 ;
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页码:669 / 676
页数:8
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