Improving the lateral resolution of the MFM technique to the 10 nm range

被引：35
|
作者：
Koblischka, MR
Hartmann, U
Sulzbach, T
机构：
[1] Univ Saarbrucken, Inst Expt Phys, D-66041 Saarbrucken, Germany
[2] Nanoworld Serv GmbH, D-91058 Erlangen, Germany
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2004年 / 272卷
关键词：
MFM imaging; preparation of tips; resolution soft magnetic sample;
D O I：
10.1016/j.jmmm.2004.01.030
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A powerful tool to investigate the magnetic properties of harddisk heads in the range of about 10 nm is demanded by magnetic data storage industry. Magnetic force microscopy (MFM) tips are prepared using the electron-beam deposition technique, which reaches the highest spatial resolution, but is not well suited for batch production. Therefore, also FIB milling is employed to produce MFM tips with a high aspect ratio similar to electron-beam deposition tips. We show that both types of tips not only improve the spatial resolution, but also considerably reduce perturbation effects on soft magnetic structures. (C) 2004 Elsevier B.V. All rights reserved.
引用
下载
收藏
页码：2138 / 2140
页数：3
相关论文
共 50 条
  • [1] Improvements of the lateral resolution of the MFM technique
    Koblischka, MR
    Hartmann, U
    Sulzbach, T
    THIN SOLID FILMS, 2003, 428 (1-2) : 93 - 97
  • [2] Resolving magnetic nanostructures in the 10-nm range using MFM at ambient conditions
    Koblischka, MR
    Hartmann, U
    Sulzbach, T
    MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2003, 23 (6-8): : 747 - 751
  • [3] Customized MFM probes with high lateral resolution
    Iglesias-Freire, Oscar
    Jaafar, Miriam
    Berganza, Eider
    Asenjo, Agustina
    BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2016, 7 : 1068 - 1074
  • [4] Near-field fluorescence imaging of single molecules with a resolution in the range of 10 nm
    Hosaka, N
    Saiki, T
    JOURNAL OF MICROSCOPY, 2001, 202 : 362 - 364
  • [5] Acoustic microscopy with resolution in the nm-range
    Rabe, U
    Janser, K
    Arnold, W
    ACOUSTICAL IMAGING, VOL 22, 1996, 22 : 669 - 676
  • [6] MEPHISTO spectromicroscope reaches 20 nm lateral resolution
    De Stasio, G
    Perfetti, L
    Gilbert, B
    Fauchoux, O
    Capozi, M
    Perfetti, P
    Margaritondo, G
    Tonner, BP
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (03): : 1740 - 1742
  • [7] Improving the resolution of hyperspectral image technique
    Wang, HH
    ICO20: ILLUMINATION, RADIATION, AND COLOR TECHNOLOGIES, 2006, 6033
  • [8] Sub-10 nm lateral spatial resolution in scanning capacitance microscopy achieved with solid platinum probes
    Bussmann, E
    Williams, CC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (02): : 422 - 425
  • [9] Resolution enhancement technique using range oversampling
    Yu, TY
    Zhang, GF
    Chalamalasetti, AB
    Doviak, RJ
    Zrnic, D
    JOURNAL OF ATMOSPHERIC AND OCEANIC TECHNOLOGY, 2006, 23 (02) : 228 - 240
  • [10] Improving nanoimprint lithography stamps for the 10 nm features
    Beck, M
    Graczyk, M
    Maximov, I
    Sarwe, EL
    Ling, TGI
    Montelius, L
    PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY, 2001, : 17 - 22
12345