Analysis of the Influence of Roughness on the Propagation Constant of a Waveguide via Two Sparse Stochastic Methods

被引：0
|
作者：
Waeytens, Ruben [1 ]
Bosman, Dries [1 ]
Huynen, Martijn [1 ]
Gossye, Michiel [1 ]
Rogier, Hendrik [1 ]
Vande Ginste, Dries [1 ]
机构：
[1] Univ Ghent, IMEC, Electromagnet Grp, IDLab,Dept Informat Technol, Ghent, Belgium
来源：
2020 IEEE 29TH CONFERENCE ON ELECTRICAL PERFORMANCE OF ELECTRONIC PACKAGING AND SYSTEMS (EPEPS 2020) | 2020年
关键词：
Interconnect structures; line edge roughness; stochastic testing; sparse polynomial chaos; UNCERTAINTY QUANTIFICATION;
D O I：
10.1109/epeps48591.2020.9231312
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The aim of this contribution is to study the effect of roughness on the propagation constant in interconnect structures. For this purpose, a stochastic framework is constructed around a full-wave electromagnetic field solver. To reduce the number of repeated calls to the full-wave simulator, two sparse stochastic techniques have been implemented and tested. A balance between calculation time and accuracy is sought for and found, which is demonstrated for a rough rectangular waveguide.
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页数：3
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