Analysis of the Influence of Roughness on the Propagation Constant of a Waveguide via Two Sparse Stochastic Methods

被引：0

作者：

Waeytens, Ruben ^{[1
]}

Bosman, Dries ^{[1
]}

Huynen, Martijn ^{[1
]}

Gossye, Michiel ^{[1
]}

Rogier, Hendrik ^{[1
]}

Vande Ginste, Dries ^{[1
]}

机构：

[1] Univ Ghent, IMEC, Electromagnet Grp, IDLab,Dept Informat Technol, Ghent, Belgium

来源：

2020 IEEE 29TH CONFERENCE ON ELECTRICAL PERFORMANCE OF ELECTRONIC PACKAGING AND SYSTEMS (EPEPS 2020) | 2020年

关键词：

Interconnect structures; line edge roughness; stochastic testing; sparse polynomial chaos; UNCERTAINTY QUANTIFICATION;

D O I：

10.1109/epeps48591.2020.9231312

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The aim of this contribution is to study the effect of roughness on the propagation constant in interconnect structures. For this purpose, a stochastic framework is constructed around a full-wave electromagnetic field solver. To reduce the number of repeated calls to the full-wave simulator, two sparse stochastic techniques have been implemented and tested. A balance between calculation time and accuracy is sought for and found, which is demonstrated for a rough rectangular waveguide.

引用

页数：3

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