NEW COMB GEOMETRY OF CAPACITIVE VIBRATION ENERGY HARVESTERS MINIATURIZING THE AIR DAMPING EFFECT

被引:0
|
作者
Lu, Y. [1 ]
Marty, F. [1 ]
Galayko, D. [2 ]
Basset, P. [1 ]
机构
[1] Univ Paris Est, ESYCOM, ESIEE Paris, Noisy Le Grand, France
[2] UPMC, Sorbonne Univ, LIP 6, CNRS, Paris, France
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a hierarchical hexahedral geometry of interdigited-comb MEMS capacitor for electrostatic vibration energy harvesters (e-VEHs), where the air damping effect is greatly reduced while the capacitance variation remains important. Based on the same frequency up-conversion structure as in our previous design, the device with the new electrode geometry reaches a larger bandwidth (10 similar to 180 Hz) in air compared to the classical gap-closing structure (80 similar to 160 Hz). The energy extracted in air during each cycle of input excitation is 85 times higher than the classical design @15Hz/2g(peak) (20 V), and is no less than 33 times higher within 10 similar to 40 Hz.
引用
收藏
页码:857 / 860
页数:4
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