NEW COMB GEOMETRY OF CAPACITIVE VIBRATION ENERGY HARVESTERS MINIATURIZING THE AIR DAMPING EFFECT

被引：0

作者：

Lu, Y. ^{[1
]}

Marty, F. ^{[1
]}

Galayko, D. ^{[2
]}

Basset, P. ^{[1
]}

机构：

[1] Univ Paris Est, ESYCOM, ESIEE Paris, Noisy Le Grand, France

[2] UPMC, Sorbonne Univ, LIP 6, CNRS, Paris, France

来源：

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) | 2017年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a hierarchical hexahedral geometry of interdigited-comb MEMS capacitor for electrostatic vibration energy harvesters (e-VEHs), where the air damping effect is greatly reduced while the capacitance variation remains important. Based on the same frequency up-conversion structure as in our previous design, the device with the new electrode geometry reaches a larger bandwidth (10 similar to 180 Hz) in air compared to the classical gap-closing structure (80 similar to 160 Hz). The energy extracted in air during each cycle of input excitation is 85 times higher than the classical design @15Hz/2g(peak) (20 V), and is no less than 33 times higher within 10 similar to 40 Hz.

引用

页码：857 / 860

页数：4

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