Micro-Transfer Printing of Lithium Niobate on Silicon Nitride

被引:21
|
作者
Vanackere, Tom [1 ,2 ,4 ]
Billet, Maximilien [1 ,2 ,4 ]
de Beeck, Camiel Op [1 ,2 ]
Poelman, Stijn [1 ,2 ]
Roelkens, Gunther [1 ,2 ]
Clemmen, Stephane [1 ,2 ,3 ,4 ]
Kuyken, Bart [1 ,2 ]
机构
[1] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, Technol Pk 126, B-9052 Ghent, Belgium
[2] Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium
[3] Univ Libre Bruxelles, Lab Informat Quant, B-1050 Brussels, Belgium
[4] Univ Libre Bruxelles ULB, OPERA Photon, CP 194-5, Brussels, Belgium
基金
欧洲研究理事会;
关键词
D O I
10.1109/ECOC48923.2020.9333415
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Successful micro-transfer printing of lithium niobate on a silicon nitride platform is demonstrated. A proof of concept electro-optical modulator is fabricated using this hybrid integration method which shows a half-wave voltage-length product V pi L pi. = 5.5 Vcm and insertion losses of 7 dB.
引用
收藏
页数:4
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