Micro-Transfer Printing of Lithium Niobate on Silicon Nitride

被引：21
|
作者：
Vanackere, Tom [1 ,2 ,4 ]
Billet, Maximilien [1 ,2 ,4 ]
de Beeck, Camiel Op [1 ,2 ]
Poelman, Stijn [1 ,2 ]
Roelkens, Gunther [1 ,2 ]
Clemmen, Stephane [1 ,2 ,3 ,4 ]
Kuyken, Bart [1 ,2 ]
机构：
[1] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, Technol Pk 126, B-9052 Ghent, Belgium
[2] Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium
[3] Univ Libre Bruxelles, Lab Informat Quant, B-1050 Brussels, Belgium
[4] Univ Libre Bruxelles ULB, OPERA Photon, CP 194-5, Brussels, Belgium
来源：
2020 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATIONS (ECOC) | 2020年
基金：
欧洲研究理事会;
关键词：
D O I：
10.1109/ECOC48923.2020.9333415
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Successful micro-transfer printing of lithium niobate on a silicon nitride platform is demonstrated. A proof of concept electro-optical modulator is fabricated using this hybrid integration method which shows a half-wave voltage-length product V pi L pi. = 5.5 Vcm and insertion losses of 7 dB.
引用
收藏
页数：4
相关论文
共 50 条
  • [21] Present and future of micro-transfer printing for heterogeneous photonic integrated circuits
    Roelkens, Gunther
    Zhang, Jing
    Bogaert, Laurens
    Soltanian, Emadreza
    Billet, Maximilien
    Uzun, Ali
    Pan, Biwei
    Liu, Yang
    Delli, Evangelia
    Wang, Dongbo
    Oliva, Valeria Bonito
    Tran, Lam Thi Ngoc
    Guo, Xin
    Li, He
    Qin, Senbiao
    Akritidis, Konstantinos
    Chen, Ye
    Xue, Yu
    Niels, Margot
    Maes, Dennis
    Kiewiet, Max
    Reep, Tom
    Vanackere, Tom
    Vandekerckhove, Tom
    Lufungula, Isaac Luntadila
    De Witte, Jasper
    Reis, Luis
    Poelman, Stijn
    Tan, Ying
    Deng, Hong
    Bogaerts, Wim
    Morthier, Geert
    Van Thourhout, Dries
    Kuyken, Bart
    APL PHOTONICS, 2024, 9 (01)
  • [22] Active Elastomeric Composite Dense Array Stamp For Micro-transfer Printing
    Ismail, Nishana
    Ferreira, Placid M.
    48TH SME NORTH AMERICAN MANUFACTURING RESEARCH CONFERENCE, NAMRC 48, 2020, 48 : 64 - 70
  • [23] Multi-physics modeling for laser micro-transfer printing delamination
    Al-okaily, Ala'a M.
    Ferreira, Placid M.
    JOURNAL OF MANUFACTURING PROCESSES, 2015, 20 : 414 - 424
  • [24] Micro-transfer printing of InGaAs/InP avalanche photodiode on Si substrate
    Alimi, Yasaman
    Guilhabert, Benoit
    Jevtics, Dimitars
    Sala, Elisa M.
    Strain, Michael J.
    Groom, Kristian M.
    Heffernan, Jon
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2025, 40 (01)
  • [25] Inorganic light-emitting diode displays using micro-transfer printing
    Cok, Ronald S.
    Meitl, Matthew
    Rotzoll, Robert
    Melnik, George
    Fecioru, Alin
    Trindade, Antonio Jose
    Raymond, Brook
    Bonafede, Salvatore
    Gomez, David
    Moore, Tanya
    Prevatte, Carl
    Radauscher, Erich
    Goodwin, Scott
    Hines, Paul
    Bower, Christopher A.
    JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2017, 25 (10) : 589 - 609
  • [26] Patterned InterVia for Heterogeneous Integration of III-V devices onto silicon photonics by using micro-Transfer Printing
    Uzun, Ali
    Rimboeck, Johanna
    Gasiorowski, Jacek
    Farrell, Alex
    Fecioru, Alin
    Loi, Ruggero
    Corbett, Brian
    2023 IEEE INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE, 3DIC, 2023,
  • [27] Selective Micro-Transfer Printing of Microspheres Using Adhesion-Switchable Stamp
    Yang, Lizhou
    Guo, Qinhua
    Zhang, Jingyang
    Gan, Yawen
    Wang, Yunda
    2024 IEEE 19TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2024, 2024,
  • [28] Electrical characterization of alkane monolayers using micro-transfer printing:: tunneling and molecular transport
    Kreuter, C.
    Baechle, S.
    Scheer, E.
    Erbe, A.
    NEW JOURNAL OF PHYSICS, 2008, 10
  • [29] A HIGH CONCENTRATION PHOTOVOLTAIC MODULE UTILIZING MICRO-TRANSFER PRINTING AND SURFACE MOUNT TECHNOLOGY
    Furman, Bruce
    Menard, Etienne
    Gray, Allen
    Meitl, Matthew
    Bonafede, Salvatore
    Kneeburg, David
    Ghosal, Kanchan
    Bukovnik, Rudolf
    Wagner, Wolfgang
    Gabriel, John
    Seel, Steven
    Burroughs, Scott
    35TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, 2010, : 475 - 480
  • [30] Compact photonic crystal Si-LN modulator realized by micro-transfer printing
    Tan, Ying
    Van Kerrebrouck, Joris
    Vanackere, Tom
    Niu, Shengpu
    Billet, Maximilien
    Niels, Margot
    Roelkens, Gunther
    Kuyken, Bart
    Van Thourhout, Dries
    2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS, 2024,
12345