Phosphorus gettering in multicrystalline silicon studied by neutron activation analysis

被引:44
|
作者
Macdonald, D [1 ]
Cuevas, A [1 ]
Kinomura, A [1 ]
Nakano, Y [1 ]
机构
[1] Australian Natl Univ, Fac Engn & Informat Technol, Dept Engn, Canberra, ACT 0200, Australia
来源
CONFERENCE RECORD OF THE TWENTY-NINTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE 2002 | 2002年
关键词
D O I
10.1109/PVSC.2002.1190514
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Neutron Activation Analysis (NAA) is a powerful and sensitive technique for measuring trace amounts of impurities. In this work, we have applied NAA to the problem of identifying metallic impurities within the bulk of solar-grade cast multicrystalline silicon (mc-Si) wafers. In particular, the change in concentrations of these contaminants after phosphorus gettering is monitored, revealing a marked reduction in some metal species, but not in others.
引用
收藏
页码:285 / 288
页数:4
相关论文
共 50 条
  • [41] Dislocation density reduction during impurity gettering in multicrystalline silicon
    Choi, H.J. (hyunjoo@mit.edu), 1600, IEEE Electron Devices Society (03):
  • [42] Dislocation Density Reduction During Impurity Gettering in Multicrystalline Silicon
    Choi, H. J.
    Bertoni, M. I.
    Hofstetter, J.
    Fenning, D. P.
    Powell, D. M.
    Castellanos, S.
    Buonassisi, T.
    IEEE JOURNAL OF PHOTOVOLTAICS, 2013, 3 (01): : 189 - 198
  • [43] Rate limiting mechanism of transition metal gettering in multicrystalline silicon
    McHugo, SA
    Thompson, AC
    Imaizumi, M
    Hieslmair, H
    Weber, ER
    DEFECTS IN SEMICONDUCTORS - ICDS-19, PTS 1-3, 1997, 258-2 : 1795 - 1800
  • [44] Gettering of copper to hydrogen-induced cavities in multicrystalline silicon
    Kinomura, A
    Horino, Y
    Nakano, Y
    Williams, JS
    JOURNAL OF APPLIED PHYSICS, 2005, 98 (06)
  • [45] Comparison of gettering in single- and multicrystalline silicon for solar cells
    Sopori, BL
    Jastrzebski, L
    Tan, T
    CONFERENCE RECORD OF THE TWENTY FIFTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1996, 1996, : 625 - 628
  • [46] Simultaneous gettering and emitter formation in multicrystalline-Si wafers by annealing phosphorus doped amorphous silicon compounds
    Ferre, Rafel
    Martin, Isidro
    Trassl, Roland
    Alcubilla, Ramon
    Brendel, Rolf
    APPLIED PHYSICS LETTERS, 2011, 98 (02)
  • [47] Hydrogenation effect on low temperature internal gettering in multicrystalline silicon
    Al-Amin, Mohammad
    Murphy, John D.
    2016 IEEE 43RD PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2016, : 585 - 590
  • [48] Gettering and passivation for high efficiency multicrystalline silicon solar cells
    Rohatgi, Ajeet
    Chen, Zhizhang
    Sana, Peyman
    Evers, Nicole
    Lolgen, Peter
    Steeman, Rob A.
    Optoelectronics Tokyo, 1994, 9 (04): : 523 - 536
  • [49] ANALYSIS OF SILICON, ALUMINIUM, AND PHOSPHORUS IN BIOLOGICAL SAMPLES BY NEUTRON ACTIVATION AND SPECTROPHOTOMETRY
    ORBAN, E
    ORDOGH, M
    SZABO, E
    MISKOVITS, G
    DUBAI, M
    BIOCHEMICAL MEDICINE, 1969, 3 (03): : 221 - +
  • [50] Calibration of phosphorus implantation dose in silicon by radiochemical neutron activation analysis
    Paul, RL
    Simons, DS
    SILICON FRONT-END JUNCTION FORMATION TECHNOLOGIES, 2002, 717 : 291 - 296