High quality, high index-contrast chalcogenide microdisk resonators

被引：19
|
作者：
Zhang, Rizhen [1 ,2 ]
Yang, Zhen [1 ,2 ]
Zhao, Mingyue [1 ,2 ]
Xu, Peipeng [1 ,2 ]
Zhang, Wei [1 ,2 ]
Kang, Zhe [3 ,4 ]
Zheng, Jiajiu [5 ]
Dai, Shixun [1 ,2 ]
Wang, Rongping [1 ,2 ]
Majumdar, Arka [5 ,6 ]
机构：
[1] Ningbo Univ, Fac Elect Engn & Comp Sci, Ningbo 315211, Peoples R China
[2] Key Lab Photoelect Detect Mat & Devices Zhejiang, Ningbo 315211, Peoples R China
[3] Zhejiang Univ, Ningbo Res Inst, Ningbo 315100, Peoples R China
[4] Zhejiang Univ, Ctr Opt & Electromagnet Res, Natl Engn Res Ctr Opt Instruments, Hangzhou 310058, Peoples R China
[5] Univ Washington, Dept Elect & Comp Engn, Seattle, WA 98195 USA
[6] Univ Washington, Dept Phys, Seattle, WA 98195 USA
来源：
OPTICS EXPRESS | 2021年 / 29卷 / 12期
基金：
中国国家自然科学基金;
关键词：
FABRICATION; NANOCAVITY; GLASS;
D O I：
10.1364/OE.427054
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate the high quality (Q) factor microdisk resonators in high index-contrast chalcogenide glass (ChG) film GeSbSe using electron-beam lithography followed by plasma dry etching. High confinement, low-loss, and single-point-coupled microdisk resonators with a loaded Q factor of 5x10(5) are measured. We also present pulley-coupled microdisk resonators for relaxing the requirements on the coupling gap. While adjusting the wrap-around coupling waveguides to be phase-matched to the resonator mode, a single specific microdisk radial mode can be excited. Moreover, the thermal characterization of microdisk resonators is carried out to estimate the thermo-optic coefficient of 6.7x10(-5)/K for bulk ChG. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码：17775 / 17783
页数：9
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