High-Q silicon optomechanical microdisk resonators at gigahertz frequencies

We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in-plane vibrational modes yields a displacement sensitivity of 4.1 x 10(-17) m/Hz(1/2). Due to the reduced clamping loss, these disk resonators possess high mechanical quality factors (Q), with the highest value of 4370 for the 1.47 GHz mode measured in ambient air. Numerical simulation on the modal frequency and mechanical Q for disks of varying undercut shows modal coupling and suggests a realistic pedestal size to achieve the highest possible Q. (C) 2012 American Institute of Physics. [http://dx. doi. org/10.1063/1.4709416]