High-Q silicon optomechanical microdisk resonators at gigahertz frequencies

被引：59
|
作者：
Sun, Xiankai [1 ]
Zhang, Xufeng [1 ]
Tang, Hong X. [1 ]
机构：
[1] Yale Univ, Dept Elect Engn, New Haven, CT 06511 USA
来源：
APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 17期
基金：
美国国家科学基金会;
关键词：
DESIGN;
D O I：
10.1063/1.4709416
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in-plane vibrational modes yields a displacement sensitivity of 4.1 x 10(-17) m/Hz(1/2). Due to the reduced clamping loss, these disk resonators possess high mechanical quality factors (Q), with the highest value of 4370 for the 1.47 GHz mode measured in ambient air. Numerical simulation on the modal frequency and mechanical Q for disks of varying undercut shows modal coupling and suggests a realistic pedestal size to achieve the highest possible Q. (C) 2012 American Institute of Physics. [http://dx. doi. org/10.1063/1.4709416]
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页数：4
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