Etching properties of DLC films prepared by the CVD method - An application of DLC films to the IC fabrication process

被引：0
|
作者：
Komatsu, Y [1 ]
Alanazi, A [1 ]
Hirakuri, KK [1 ]
机构：
[1] Tokyo Denki Univ, Fac Sci & Engn, Dept Appl Elect, Hatoyama, Saitama 35003, Japan
来源：
DIAMOND FILMS AND TECHNOLOGY | 1997年 / 7卷 / 5-6期
关键词：
CVD; DLC film; IC fabrication process; etching; resist material;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：321 / 324
页数：4
相关论文
共 50 条
  • [41] The mechanical properties of DLC and fluorinated DLC films deposited using unbalanced magnetron sputter ion plating method
    Choy, KL
    Zhao, JS
    SCRIPTA MATERIALIA, 1998, 39 (07) : 839 - 845
  • [42] Synthesis and characterization of composite films of silver nanoparticles embedded in DLC matrix prepared by plasma CVD technique
    Paul, R.
    Gayen, R. N.
    Hussain, S.
    Khanna, V.
    Bhar, R.
    Pal, A. K.
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2009, 47 (01):
  • [43] Evaluation and prediction of mechanical properties of DLC films by raman spectroscopy (Part 1) - DLC films prepared by bipolar PBII&D with a source gas of toluene -
    Choi, Junho
    Ishii, Keisuke
    Kato, Takahisa
    Kawaguchi, Masahiro
    Toraibarojisuto/Journal of Japanese Society of Tribologists, 2013, 58 (08): : 596 - 602
  • [44] Properties of DLC and Nitrogen-Doped DLC Films Deposited by DC Magnetron Sputtering
    Kahn, Markus
    Menegazzo, Nicola
    Mizaikoff, Boris
    Berghauser, Roswitha
    Lackner, Juergen M.
    Hufnagel, Daniel
    Waldhauser, Wolfgang
    PLASMA PROCESSES AND POLYMERS, 2007, 4 : S200 - S204
  • [45] Comparative Investigation of the Mechanical and Wear Properties of Multilayer Si-DLC/DLC Films
    Kobayashi, Yukio
    Nishimoto, Akio
    MATERIALS TRANSACTIONS, 2021, 62 (02) : 271 - 277
  • [46] Comparative Investigation of the Mechanical and Wear Properties of Multilayer Si-DLC/DLC Films
    Kobayachi, Yukio
    Nishimoto, Akio
    JOURNAL OF THE JAPAN INSTITUTE OF METALS AND MATERIALS, 2021, 85 (05) : 167 - 173
  • [47] Comparative investigation of the mechanical and wear properties of multilayer si-dlc/dlc films
    Kobayashi, Yukio
    Nishimoto, Akio
    Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals, 2021, 85 (05): : 167 - 173
  • [48] The influence of textured interface on DLC films prepared by vacuum arc
    Liu, X.
    Zhang, W.
    Sun, G.
    SURFACE & COATINGS TECHNOLOGY, 2019, 365 : 143 - 151
  • [49] Evaluation of raw hardness of DLC thin films prepared by IBAD
    Funada, Y
    Awazu, K
    Yasui, H
    Sugita, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 148 (1-4): : 664 - 668
  • [50] DLC films prepared by electron evaporation of graphite in an ECR plasma
    Muhl, S
    Camps, E
    Escobar-Alarcón, L
    Olea, O
    Miki, M
    Morrison, NA
    DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 915 - 919
12345