Surface acoustic wave properties of ZnO films grown by magnetron sputtering

被引：4
|
作者：
Yang, Guang [1 ]
Santos, Paulo V.
机构：
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Div Laser Sci & Technol, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Sch Optoelect Sci & Engn, Wuhan 430074, Peoples R China
[3] Paul Drude Inst Solid State Elect, D-10117 Berlin, Germany
来源：
ACTA PHYSICA SINICA | 2007年 / 56卷 / 06期
关键词：
ZnO films; x-ray diffraction; surface acoustic waves;
D O I：
10.7498/aps.56.3515
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In this letter we report the fabrication and structural properties of ZnO thin films grown on GaAs, Au/GaAs, Si and glass substrates by rf magnetron sputtering. The x-ray diffraction data indicated that all the ZnO films were pure c-axis oriented and the rocking curves showed that the full-width at half maximum (FWHM) of ZnO(002) peak of ZnO/Au/GaAs films is as small as 2.41 degrees. The SEM images showed better surface for the ZnO films grown with Au buffer. The surface acoustic wave properties of IDT/ZnO/GaAs filter were measured by HP8753C network analyzer. The results indicated that the insertion loss is only 10.4 dB and the electric efficiency can be up to 84.1% using the 5.6 mu m-wavelength IDT.
引用
收藏
页码：3515 / 3520
页数：6
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