Nanoporous TiO2 thin film based conductometric H2 sensor

被引：48
|
作者：
Sadek, A. Z. [1 ]
Partridge, J. G. [2 ]
McCulloch, D. G. [2 ]
Li, Y. X. [3 ]
Yu, X. F. [3 ]
Wlodarski, W. [1 ]
Kalantar-zadeh, K. [1 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia
[2] RMIT Univ, Sch Appl Sci, Melbourne, Vic 3001, Australia
[3] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
来源：
THIN SOLID FILMS | 2009年 / 518卷 / 04期
关键词：
Nanoporous TiO2; Anodization; FCVA; H-2; sensor; NANOTUBE-ARRAYS; SOLAR-CELLS; GAS SENSOR; TITANIA; HYDROGEN; FABRICATION; ANODIZATION; GROWTH; LENGTH; LAYERS;
D O I：
10.1016/j.tsf.2009.02.151
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nanoporous titanium dioxide (TiO2) based conductometric sensors have been fabricated and their sensitivity to hydrogen (H-2) gas has been investigated. A filtered cathodic vacuum arc (FCVA) system was used to deposit ultra-smooth Ti thin films on a transducer having patterned inter-digital gold electrodes (IDTs). Nanoporous TiO2 films were obtained by anodization of the titanium (Ti) thin films using a neutral 0.5% (wt) NH4F in ethylene glycol solution at 5 V for 1 h. After anodization, the films were annealed at 600 degrees C for 8 h to convert the remaining Ti into TiO2. The scanning electron microscopy (SEM) images revealed that the average diameters of the nanopores are in the range of 20 to 25 nm. The sensor was exposed to different concentrations of H-2 in synthetic air at operating temperatures between 100 degrees C and 300 degrees C. The sensor responded with a highest sensitivity of 1.24 to 1% of H-2 gas at 225 degrees C. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：1294 / 1298
页数：5
相关论文
共 50 条
  • [41] Mesoporous thin film TiO2 electrodes
    Kavan, L
    Rathousky, J
    Grätzel, M
    Shklover, V
    Zukal, A
    MICROPOROUS AND MESOPOROUS MATERIALS, 2001, 44 : 653 - 659
  • [42] A CURRENT INSTABILITY IN TIO2 THIN FILM
    HADA, T
    HAYAKAWA, S
    WASA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (09) : 1078 - +
  • [43] Behavior of TiO2 thin film in a nanocapacitor
    Jia, Dongdong
    Shaffer, C.
    Pickering, S.
    Goonewardene, A.
    Wang, Xiao-Jun
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2008, 8 (03) : 1234 - 1237
  • [44] UV-assisted room-temperature chemiresistive NO2 sensor based on TiO2 thin film
    Xie, Ting
    Sullivan, Nichole
    Steffens, Kristen
    Wen, Baomei
    Liu, Guannan
    Debnath, Ratan
    Davydov, Albert
    Gomez, Romel
    Motayed, Abhishek
    JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 653 : 255 - 259
  • [45] An electrochemical dopamine sensor based on RF magnetron sputtered TiO2/SS thin film electrode
    Amir, H.
    Ponpandian, N.
    Viswanathan, C.
    MATERIALS LETTERS, 2021, 300
  • [46] A Photoelectrochemical Sensor for Methanol based on Its Oxidation at TiO2 Thin Film Modified Ti Electrode
    Zarei, Ebrahim
    ANALYTICAL & BIOANALYTICAL ELECTROCHEMISTRY, 2019, 11 (05): : 566 - 576
  • [47] Electrochemical sensor for acetaminophen based on an imprinted TiO2 thin film prepared by liquid phase deposition
    Wang, Chenghang
    Li, Chunya
    Wei, Laifa
    Wang, Changfa
    MICROCHIMICA ACTA, 2007, 158 (3-4) : 307 - 313
  • [48] Electrochemical sensor for acetaminophen based on an imprinted TiO2 thin film prepared by liquid phase deposition
    Chenghang Wang
    Chunya Li
    Laifa Wei
    Changfa Wang
    Microchimica Acta, 2007, 158 : 307 - 313
  • [49] Flexible highly sensitive hydrogen gas sensor based on a TiO2 thin film on polyimide foil
    Krsko, O.
    Plecenik, T.
    Roch, T.
    Grancic, B.
    Satrapinskyy, L.
    Truchly, M.
    Durina, P.
    Gregor, M.
    Kus, P.
    Plecenik, A.
    SENSORS AND ACTUATORS B-CHEMICAL, 2017, 240 : 1058 - 1065
  • [50] Comparison of the phase transformation rate for TiO2 thin film and TiO2 nanorods
    Chen, Yi
    Kang, K. S.
    Nayak, J.
    Kim, Jaehwan
    NANOSENSORS, BIOSENSORS, AND INFO-TECH SENSORS AND SYSTEMS 2010, 2010, 7646
12345