共 50 条
- [1] CHARACTERIZATION OF ELECTRON-BEAM EXPOSED OPTICAL RESIST JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 361 - 365
- [3] POLYSILOXANE RESIST AS A PROBE FOR ENERGY DEPOSITED IN ELECTRON-BEAM EXPOSED RESISTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1372 - 1377
- [4] A STATISTICALLY BASED MODEL OF ELECTRON-BEAM EXPOSED, CHEMICALLY AMPLIFIED NEGATIVE RESIST JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3362 - 3369
- [5] RESIST MATERIALS FOR ELECTRON-BEAM LITHOGRAPHY JOURNAL OF IMAGING TECHNOLOGY, 1985, 11 (04): : 164 - 167
- [6] POLYDIALLYLORTHOPHTHALATE RESIST FOR ELECTRON-BEAM LITHOGRAPHY POLYMER ENGINEERING AND SCIENCE, 1980, 20 (16): : 1110 - 1114
- [7] RESIST CHARGING IN ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (05): : 1979 - 1983
- [9] POLYDIALLYLORTHOPHTHALATE RESIST FOR ELECTRON-BEAM LITHOGRAPHY FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1982, 18 (03): : 453 - 467
- [10] ELECTRON-BEAM TOOL RESIST INTERDEPENDENCE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1327 - 1330