共 50 条
- [31] PREBAKE EFFECTS IN CHEMICAL AMPLIFICATION ELECTRON-BEAM RESIST JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3138 - 3141
- [32] Plasma graft polymerized styrene as an electron-beam resist PLASMA DEPOSITION AND TREATMENT OF POLYMERS, 1999, 544 : 141 - 152
- [33] Submicron thermocouple measurements of electron-beam resist heating JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06): : 3044 - 3046
- [34] NOVEL, NEGATIVE-WORKING ELECTRON-BEAM RESIST ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1984, 188 (AUG): : 12 - ACSC
- [35] A NEW RESIST FOR ELECTRON-BEAM AND DEEP UV MICROLITHOGRAPHY ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1984, 187 (APR): : 99 - POLY
- [36] RESIST HEATING EFFECT IN DIRECT ELECTRON-BEAM WRITING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 853 - 857
- [38] Electron-beam lithography: Resist requirements and performance. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 222 : U248 - U248