Characterization of diphasic nc-Si/a-Si:H thin films and solar cells

被引:1
|
作者
Zhang, SB [1 ]
Xu, YY [1 ]
Hu, ZH [1 ]
Wang, YQ [1 ]
Zeng, XB [1 ]
Diao, HW [1 ]
Wang, WJ [1 ]
Kong, GL [1 ]
Liao, XB [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Lab Surface Phys, Beijing 100083, Peoples R China
关键词
D O I
10.1109/PVSC.2002.1190818
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Hydrogenated silicon films with diphasic structure have been prepared by using a new regime of plasma enhanced chemical vapor deposition (PECVD) in the region adjacent to the phase transition from amorphous to crystal. line state. The photoelectronic and microstructural properties of the films have been characterized by the constant photocurrent method (CPM), Raman scattering and nuclear magnetic resonance (NMR). In comparison with typical hydrogenated amorphous silicon (a-Si:H), these diphasic films with a crystalline fraction less than 0.3 show a similar optical absorption coefficient, lower deep-defect densities and higher stability upon light soaking. By using the diphasic nc-Si/a-Si films a p-i-n junction solar cell has been prepared With an initial efficiency of 8.51 % and a stabilized efficiency of 8.02 % on an area of 0.126 cm(2) (AM1.5, 100 mW/cm(2)).
引用
收藏
页码:1182 / 1185
页数:4
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