Calculation of silicon antireflective microstructures for mid-infrared applications

被引：0
|
作者：
Song, Y. M. [1 ]
Chang, K. S. [2 ]
机构：
[1] Pusan Natl Univ, Dept Elect Engn, 2 Busandaehak Ro, Pusan 609735, South Korea
[2] Korea Basic Sci Inst, Ctr Analyt Instrumentat Dev, Daejeon 305806, South Korea
来源：
2014 14TH INTERNATIONAL CONFERENCE ON NUMERICAL SIMULATION OF OPTOELECTRONIC DEVICES (NUSOD 2014) | 2014年
关键词：
BROAD-BAND ANTIREFLECTION; FABRICATION;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Diffraction efficiencies of antireflective microstructures (AMSs) were calculated using a rigorous coupled wave analysis (RCWA) method for mid-infrared applications. The results show the effect of height, period, and shape of AMSs on the reflection. We also discuss optimum geometry of AMSs for mid-infrared application.
引用
收藏
页码：33 / +
页数：2
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