Cyclotene® diaphragm for MEMS-based IR detectors

A novel structure employing Dow Chemical (Midland, MI) benzocyclobutene (BCB) Cyclotene(R) as a diaphragm material is presented in this report. The main advantages of this BCB diaphragm are its low thermal conductivity, robustness, chemical inertness, low curing temperature and high structure yield. Moreover, a BCB film can be either photo-defined or plasma etched and is a suitable micromachining material for post IC processing. Micromachined IR thermopile single detectors and lineal detector arrays (1x16), using BiSeTeSb/BiSbTe sensing elements on BCB diaphragms, have been constructed and tested. Up to 100% structure yield has been obtained. The process used to realize this detector structure is compatible with the eventual inclusion of on-chip circuitry for signal amplification and conditioning.