Cyclotene® diaphragm for MEMS-based IR detectors

被引：2
|
作者：
Guo, SW [1 ]
机构：
[1] Goodrich Corp, Sensor Syst, Burnsville, MN 55306 USA
来源：
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VIII | 2003年 / 4979卷
关键词：
Cyclotene (R); BCB; diaphragm; thermopile; infrared detector;
D O I：
10.1117/12.472808
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel structure employing Dow Chemical (Midland, MI) benzocyclobutene (BCB) Cyclotene(R) as a diaphragm material is presented in this report. The main advantages of this BCB diaphragm are its low thermal conductivity, robustness, chemical inertness, low curing temperature and high structure yield. Moreover, a BCB film can be either photo-defined or plasma etched and is a suitable micromachining material for post IC processing. Micromachined IR thermopile single detectors and lineal detector arrays (1x16), using BiSeTeSb/BiSbTe sensing elements on BCB diaphragms, have been constructed and tested. Up to 100% structure yield has been obtained. The process used to realize this detector structure is compatible with the eventual inclusion of on-chip circuitry for signal amplification and conditioning.
引用
收藏
页码：422 / 429
页数：8
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