Stability of nitrogen in sputtered iron nitride thin films and multilayers

被引：0

作者：

Chatbi, H ^{[1
]}

Vergnat, M ^{[1
]}

Bobo, JF ^{[1
]}

Hennet, L ^{[1
]}

机构：

[1] Univ Nancy 1, Met Phys & Sci Mat Lab, CNRS, URA 155, F-54506 Vandoeuvre Nancy, France

来源：

MAGNETIC ULTRATHIN FILMS, MULTILAYERS AND SURFACES - 1997 | 1997年 / 475卷

关键词：

D O I：

10.1557/PROC-475-309

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Different phases of FeN thin films and Fe/FeN multilayers were prepared by reactive rf sputtering. The release of nitrogen and the crystallographic transformations during annealing were monitored by thermal desorption spectrometry and X-ray diffraction experiments. Finally, the diffusivity of nitrogen in the gamma'-Fe4N phase was evaluated.

引用

页码：309 / 314

页数：6

共 50 条

[41] Nanoindentation study of sputtered nanocrystalline iron thin films
Savader, JB
Scanlon, MR
Cammarata, RC
Smith, DT
Hayzelden, C
SCRIPTA MATERIALIA, 1997, 36 (01) : 29 - 34
[42] Enhancement of the chemical stability of hydrogenated aluminum nitride thin films by nitrogen plasma treatment
Cho, MH
Kang, YS
Kim, HY
Lee, PS
Lee, JY
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2001, 4 (02) : F7 - F9
[43] Correlation between iron self-diffusion and thermal stability in doped iron nitride thin films
Tayal, Akhil
Gupta, Mukul
Kumar, D.
Reddy, V. R.
Gupta, Ajay
Amir, S. M.
Korelis, Panagiotis
Stahn, Jochen
JOURNAL OF APPLIED PHYSICS, 2014, 116 (22)
[44] Effect of the nitrogen-argon gas mixtures on the superconductivity properties of reactively sputtered molybdenum nitride thin films
Haberkorn, N.
Bengio, S.
Suarez, S.
Perez, P. D.
Sirena, M.
Guimpel, J.
MATERIALS LETTERS, 2018, 215 : 15 - 18
[45] Effect of Al doping on phase formation and thermal stability of iron nitride thin films
Tayal, Akhil
Gupta, Mukul
Pandey, Nidhi
Gupta, Ajay
Horisberger, Michael
Stahn, Jochen
JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 650 : 647 - 653
[46] Formation and stability of pyrochlore in sputtered SBT thin films
Li, Y. B.
Zhang, S.
Fei, W. D.
Gan, Z. H.
Mhaisalkar, S.
ADVANCES IN APPLIED CERAMICS, 2007, 106 (04) : 180 - 185
[47] Characterization of magnetron-sputtered epsilon iron-nitride films
Niederdrenk, M
Schaaf, P
Lieb, KP
Schulte, O
JOURNAL OF ALLOYS AND COMPOUNDS, 1996, 237 (1-2) : 81 - 88
[48] Thermal stability of carbon nitride thin films
Hellgren, N
Lin, N
Broitman, E
Serin, V
Grillo, SE
Twesten, R
Petrov, I
Colliex, C
Hultman, L
Sundgren, JE
JOURNAL OF MATERIALS RESEARCH, 2001, 16 (11) : 3188 - 3201
[49] Thermal stability of carbon nitride thin films
Niklas Hellgren
Nian Lin
Esteban Broitman
Virginie Serin
Stefano E. Grillo
Ray Twesten
Ivan Petrov
Christian Colliex
Lars Hultman
Jan-Eric Sundgren
Journal of Materials Research, 2001, 16 : 3188 - 3201
[50] Elemental composition and microstructure of reactively sputtered carbon nitride thin films
Kumar, Sunil
Tansley, T.L.
Journal of Applied Physics, 1994, 76 (07):

← 1 2 3 4 5 →