Micromachining of PZT-based MEMS

被引：0
|
作者：
Myers, TB [1 ]
Bose, S
Bandyopadhyay, A
Fraser, JD
机构：
[1] Washington State Univ, Sch Mech & Mat Engn, Pullman, WA 99164 USA
[2] Philips, Scanhead Technol Unit, Bothell, WA USA
来源：
AMERICAN CERAMIC SOCIETY BULLETIN | 2003年 / 82卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：30 / 34
页数：5
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