A ZnO/SiO2/Si (100) love mode transducer

被引：0
|
作者：
Kalantar-zadeh, K [1 ]
Wlodarski, W [1 ]
Holland, A [1 ]
Reeves, G [1 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Syst Engn, Melbourne, Vic 3001, Australia
来源：
COMMAD 2000 PROCEEDINGS | 2000年
关键词：
D O I：
10.1109/COMMAD.2000.1022966
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
ZnO/SiO2/Si(100) Love mode transducers were fabricated. SiO2 films were deposited using electron beam evaporation. ZnO films were deposited using r.f. magnetron sputtering. ZnO and SiO2 films were examined by SEM and the performance of the transducers was examined by their acoustic response. The observation of the SAW Love mode delay fine was performed under untuned conditions. Operating frequencies of the transducers were around 85 MHz.
引用
收藏
页码：367 / 370
页数：4
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