High temperature stable super high electromechanical coupling saw substrates and application for saw devices

被引：3
|
作者：
Yamanouchi, K [1 ]
Ishii, T [1 ]
机构：
[1] Tohoku Inst Technol, Taihaku Ku, Sendai, Miyagi 9828577, Japan
来源：
PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION | 2002年
关键词：
surface acoustic wave; SiO2/LiNbO3; substrate; high coupling; zero TCF; wide band SAW filter;
D O I：
10.1109/FREQ.2002.1075858
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this study, in order to improve the temperature coefficient of frequency (TCF), the propagation characteristics of SiO2/Rotated Y-cut, X-propagating LiNbO3 leaky Surface Acoustic Wave (SAW) substrates with a large electromechanical coupling coefficient (k(2)), zero attenuation and zero TCF are theoretically investigated. The results showed a large k(2) of more than 0.2 (zero k(2) of Rayleigh mode) zero TCF and zero propagation attenuation for leaky SAW in the case of a short boundary at a thin film thickness of H/lambda=0.15similar to022(H: SiO2 film thickness,lambda:SAW wavelength). The experimental results agreed with the theoretical ones.
引用
收藏
页码：66 / 69
页数：4
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