High-temperature stability of LiNbO3 based SAW devices

被引：0
|
作者：
Hauser, R [1 ]
Reindl, L [1 ]
Biniasch, J [1 ]
机构：
[1] Carinthian Tech Res AG, Villach, Austria
来源：
2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The high temperature stability of SAW (surface acoustic wave) devices based on LiNbO3 is investigated in this paper for high temperature applications up to 400degrees C. Driven by the need for high temperature application based on sophisticated SAW technology, for temperature measurement and identifying a pressure sensor inside of a combustion engine, LiNbO3 has been examined, regarding a low cost solution and mass production. Using a high temperature oven and a network analyzer the acoustic attenuation loss and the aging of the devices have been observed. The aging and demolition of substrates and metalizations have been investigated in detail to make an estimation of the economic lifetime. Finally this paper shows the capability of LiNbO3 based SAW devices for temporary usage in high-temperature applications.
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页码：192 / 195
页数：4
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