In-situ spectroscopic ellipsometry of HgCdTe

被引：13
|
作者：
Benson, JD
Cornfeld, AB
Martinka, M
Singley, KM
Derzko, Z
Shorten, PJ
Dinan, JH
机构：
[1] USA,RES LAB,FT BELVOIR,VA 22060
[2] JA WOOLLAM CO INC,LINCOLN,NE 68508
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1996年 / 25卷 / 08期
关键词：
molecular beam epitaxy; spectroscopic ellipsometry;
D O I：
10.1007/BF02655042
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An in-situ spectroscopic ellipsometer has been equipped on a molecular beam epitaxy system to improve control of HgCdTe growth. Using this device, in-situ analysis of composition, growth rate, and surface cleanliness were monitored. A real time model which determined the compositional profile was used. The ellipsometer was employed to give in-situ real time control of the growth process.
引用
收藏
页码：1406 / 1410
页数：5
相关论文
共 50 条
  • [1] Composition control of long wavelength MBE HgCdTe using In-situ spectroscopic ellipsometry
    Dennis Edwall
    Jamie Phillips
    Don Lee
    Jose Arias
    [J]. Journal of Electronic Materials, 2001, 30 : 643 - 646
  • [2] Composition control of long wavelength MBE HgCdTe using in-situ spectroscopic ellipsometry
    Edwall, D
    Phillips, J
    Lee, D
    Arias, J
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2001, 30 (06) : 643 - 646
  • [3] In situ spectroscopic ellipsometry for temperature control in molecular beam epitaxy of HgCdTe
    Shvets, V. A.
    Marin, D. V.
    Azarov, I. A.
    Yakushev, M. V.
    Rykhlitskii, S. V.
    [J]. JOURNAL OF CRYSTAL GROWTH, 2022, 599
  • [4] Electrodeposition of CdSe films:: In-situ study by spectroscopic ellipsometry
    Reck, J
    Beck, U
    Dohrmann, JK
    [J]. ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-INTERNATIONAL JOURNAL OF RESEARCH IN PHYSICAL CHEMISTRY & CHEMICAL PHYSICS, 2000, 214 : 83 - 93
  • [5] In-situ ultra-high vacuum spectroscopic ellipsometry
    Fukazawa, T
    Ishihara, K
    Hoshi, Y
    Kawabata, S
    [J]. INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY, 1996, 2873 : 180 - 183
  • [6] In-situ monitor and control using fast spectroscopic ellipsometry
    Woollam, JA
    Gao, X
    Heckens, S
    Hilfiker, JN
    [J]. INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY, 1996, 2873 : 140 - 143
  • [7] InN growth and annealing investigations using in-situ spectroscopic ellipsometry
    Drago, M
    Schmidtling, T
    Werner, C
    Pristovsek, M
    Pohl, UW
    Richter, W
    [J]. JOURNAL OF CRYSTAL GROWTH, 2004, 272 (1-4) : 87 - 93
  • [8] An in-situ spectroscopic ellipsometry study of the effects of potential on fibrinogen/thrombin
    Walker, Marlon L.
    Elliot, John T.
    Reipa, Vytautas
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2007, 233
  • [9] In-situ observation of photodoping phenomena in chalcogenide glass by spectroscopic ellipsometry
    Murakami, Y.
    Wakaki, M.
    Kawabata, S.
    [J]. PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 5, 2008, 5 (05): : 1283 - +
  • [10] In situ spectroscopic ellipsometry for monitoring and control of HgCdTe heterostructures grown by molecular beam epitaxy
    Almeida, LA
    Bevan, MJ
    Duncan, WM
    Shih, HD
    [J]. INFRARED APPLICATIONS OF SEMICONDUCTORS - MATERIALS, PROCESSING AND DEVICES, 1997, 450 : 269 - 274
12345