In-situ observation of photodoping phenomena in chalcogenide glass by spectroscopic ellipsometry

被引:9
|
作者
Murakami, Y. [1 ]
Wakaki, M. [2 ]
Kawabata, S. [3 ]
机构
[1] Tsukuba Univ Technol, Res & Support Ctr Higher Educ, 4-12-7 Kasuga, Tsukuba, Ibaraki 3050821, Japan
[2] Tokai Univ, Sch Engn, Dept Opt & Imaging Sci & Technol, Kanagawa 2591292, Japan
[3] Tokyo Polytech Univ, Fac Engn, Gen Educ & Res Ctr, Kanagawa 2430297, Japan
关键词
D O I
10.1002/pssc.200777797
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Anormalous diffusion process of Ag into an As2S3 film induced by illumination of light with photon energy larger than optical gap was examined in-situ by spectroscopic ellipsometry in the wavelength regions between 450 and 850 nm. Two steps of doping called as the optical constants, which is difficult to obtain by the monochromatic ellipsometry. The features of photodoping were clearly observed through the results of spectroscopic ellipsometry, which suggests the superiority of the method to treat for such complex phenomenon.
引用
收藏
页码:1283 / +
页数:2
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