Analysis of Multilayer Devices for Superconducting Electronics by High-Resolution Scanning Transmission Electron Microscopy and Energy Dispersive Spectroscopy

被引：5
|
作者：
Missert, Nancy [1 ]
Kotula, Paul G. [1 ]
Rye, Michael [1 ]
Rehm, Laura [2 ]
Sluka, Volker [2 ]
Kent, Andrew D. [2 ]
Yohannes, Daniel [3 ]
Kirichenko, Alex F. [3 ]
Vernik, Igor V. [3 ]
Mukhanov, Oleg A. [3 ]
Bolkhovsky, Vladimir [4 ]
Wynn, Alex [4 ]
Johnson, Leonard [4 ]
Gouker, Mark [4 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
[2] NYU, New York, NY 10003 USA
[3] Hypres Inc, Elmsford, NY 10523 USA
[4] MIT, Lincoln Lab, Lexington, MA 02420 USA
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2017年 / 27卷 / 04期
关键词：
Josephson junctions; magnetic multilayers; super-conducting materials; scanning transmission electron microscopy;
D O I：
10.1109/TASC.2017.2669579
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.
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页数：4
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