Analysis of the structure and interfaces of multilayer using high-resolution transmission electron microscopy

被引：0
|
作者：
Shao, Jianda [1 ]
Fan, Zhengxiu [1 ]
Wang, Guiying [1 ]
Ding, Zhihua [1 ]
机构：
[1] Shanghai Inst of Optics and Fine, Mechanics, Academia Sinica, Shanghai, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 1994年 / 21卷 / 06期
关键词：
Image processing - Interfaces (materials) - Structure (composition) - Transmission electron microscopy;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure of a Mo/Si multilayer fabricated by planar magnetron sputtering was investigated using SAXD and HRTEM techniques. The FC-digital image processing system can easily give the digital results of the structure parameters induced in the analysis of HRTEM.
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页码：457 / 462
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