Analysis of Multilayer Devices for Superconducting Electronics by High-Resolution Scanning Transmission Electron Microscopy and Energy Dispersive Spectroscopy

被引：5

作者：

Missert, Nancy ^{[1
]}

Kotula, Paul G. ^{[1
]}

Rye, Michael ^{[1
]}

Rehm, Laura ^{[2
]}

Sluka, Volker ^{[2
]}

Kent, Andrew D. ^{[2
]}

Yohannes, Daniel ^{[3
]}

Kirichenko, Alex F. ^{[3
]}

Vernik, Igor V. ^{[3
]}

Mukhanov, Oleg A. ^{[3
]}

Bolkhovsky, Vladimir ^{[4
]}

Wynn, Alex ^{[4
]}

Johnson, Leonard ^{[4
]}

Gouker, Mark ^{[4
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

[2] NYU, New York, NY 10003 USA

[3] Hypres Inc, Elmsford, NY 10523 USA

[4] MIT, Lincoln Lab, Lexington, MA 02420 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2017年 / 27卷 / 04期

关键词：

Josephson junctions; magnetic multilayers; super-conducting materials; scanning transmission electron microscopy;

D O I：

10.1109/TASC.2017.2669579

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

引用

页数：4

共 50 条

[21] RECENT ADVANCES IN HIGH-RESOLUTION SCANNING-TRANSMISSION ELECTRON-MICROSCOPY
BOVEY, P
DESPORTES, A
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1985, 10 (02): : A53 - A53
[22] Application of high-resolution transmission electron microscopy and electron energy-loss spectroscopy in the characterization of polymer nanotubes
Shang, Lei
Li, Xiaoru
Wang, Yiqian
E-POLYMERS, 2013, 13 (01):
[23] HIGH-RESOLUTION ELECTRON-MICROSCOPY AND ELECTRON-ENERGY LOSS SPECTROSCOPY
THOMAS, JM
ACS SYMPOSIUM SERIES, 1983, 211 : 445 - 472
[24] A HIGH-RESOLUTION SCANNING TRANSMISSION ELECTRON MICROSCOPE
CREWE, AV
WALL, J
WELTER, LM
JOURNAL OF APPLIED PHYSICS, 1968, 39 (13) : 5861 - &
[25] HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY
GIBSON, JM
MRS BULLETIN, 1991, 16 (03) : 27 - 33
[26] HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY
GRUEHN, R
ROSS, R
CHEMIE IN UNSERER ZEIT, 1987, 21 (06) : 194 - 206
[27] Advances in high-resolution transmission electron microscopy
Phillipp, F
MATERIALS TRANSACTIONS JIM, 1998, 39 (09): : 888 - 902
[28] HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY
BARRY, JC
ANSTIS, GR
MATERIALS FORUM, 1994, 18 : 31 - 50
[29] High-resolution scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS) of ZnSxSe1-x/ZnSe quantum wells
Bollig, B.
Geyzers, K.P.
Heuken, M.
Advanced Materials for Optics and Electronics, 1994, 3 (1-6): : 183 - 190
[30] Aberration corrected high-resolution transmission and scanning transmission electron microscopy of thin perovskite layers
Walther, T.
Ross, I. M.
EUROPEAN CONFERENCE ON NANO FILMS - ECNF2012, 2013, 40 : 49 - 55

← 1 2 3 4 5 →