Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows

被引：9
|
作者：
Astashynski, V. M.
Ananin, S. I.
Emelyarlenko, A. S.
Kostyukevich, E. A.
Kuzmitzky, A. M.
Zhvavy, S. P.
Uglov, V. V.
机构：
[1] Natl Acad Sci Belarus, Inst Atom & Mol Phys, Minsk 220072, BELARUS
[2] Natl Acad Sci Belarus, Inst Elect, Minsk 220090, BELARUS
[3] Belarusian State Univ, Minsk 220080, BELARUS
来源：
APPLIED SURFACE SCIENCE | 2006年 / 253卷 / 04期
关键词：
plasma processing; plasma accelerators (guns); surface modification; melting; crystallization;
D O I：
10.1016/j.apsusc.2006.03.023
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The results of numerical simulation of monocrystalline silicon melting and crystallization under the action of compression plasma flow generated by quasistationary plasma accelerators with regard to phase transformations based on Kolmogorov equation are presented. Temporal and spatial characteristics of melting and crystallization processes for pulses of various forms are discussed. Based on data received and estimates made, the conclusion on substantial role of thermoelectric instability in bulk periodic structures formation was made. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：1866 / 1872
页数：7
相关论文
共 50 条
  • [1] Formation of relief on a metallic target surface under the action of compression-plasma flows
    Astashinski V.M.
    Leyvi A.Y.
    Uglov V.V.
    Cherenda N.N.
    Yalovets A.P.
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2014, 8 (3) : 519 - 523
  • [2] Silicon surface exfoliation under compression plasma flow action
    Dojcinovic, I. P.
    Kuraica, M. M.
    Randjelovic, D.
    Matic, M.
    Puric, J.
    2006 25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS, 2006, : 145 - +
  • [3] Nitriding of steel and titanium surface layers under the action of compression plasma flows
    Cherenda, N. N.
    Shimanskii, V. I.
    Uglov, V. V.
    Astashinskii, V. M.
    Ukhov, V. A.
    JOURNAL OF SURFACE INVESTIGATION, 2012, 6 (02): : 319 - 325
  • [4] Nitriding of steel and titanium surface layers under the action of compression plasma flows
    N. N. Cherenda
    V. I. Shimanskii
    V. V. Uglov
    V. M. Astashinskii
    V. A. Ukhov
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2012, 6 : 319 - 325
  • [5] Laser Formation of Periodic Micro- and Nanostructureson the Surface of Monocrystalline Silicon
    Mohylyak, I. A.
    Bonchyk, O. Yu
    Korniy, S. A.
    Kiyak, S. G.
    Popovych, D., I
    PHYSICS AND CHEMISTRY OF SOLID STATE, 2020, 21 (02): : 215 - 218
  • [6] Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
    V. V. Uglov
    V. M. Anishchik
    V. V. Astashynski
    V. M. Astashynski
    S. I. Ananin
    V. V. Askerko
    E. A. Kostyukevich
    A. M. Kuz’mitski
    N. T. Kvasov
    A. L. Danilyuk
    Journal of Experimental and Theoretical Physics Letters, 2001, 74 : 213 - 215
  • [7] Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
    Uglov, VV
    Anishchik, VM
    Astashynski, VV
    Astashynski, VM
    Ananin, SI
    Askerko, VV
    Kostyukevich, EA
    Kuz'mitski, AM
    Kvasov, NT
    Danilyuk, AL
    JETP LETTERS, 2001, 74 (04) : 213 - 215
  • [8] Magnetic field influence on silicon surface periodic structures obtained by plasma flow action
    Dojcinovic, I. P.
    Kuraica, M. M.
    Mitrovic, M.
    Randjelovic, D.
    Matic, M.
    Puric, J.
    2006 25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS, 2006, : 149 - +
  • [9] Metallization of monocrystalline silicon under shock compression
    Gilev, SD
    Trubachev, AM
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1999, 211 (01): : 379 - 383
  • [10] Mechanisms of surface formation at treatment with compression plasma flows
    Leyvi, A. Ya
    Yalovets, A. P.
    6TH INTERNATIONAL CONGRESS ENERGY FLUXES AND RADIATION EFFECTS, 2018, 1115
12345