Characteristic enhancement of InGaN-based light emitting diodes grown on pattern sapphire substrates

被引:1
|
作者
Wang, Huanyou [1 ]
Jin, Gui [1 ,2 ]
Tan, Qiaolai [1 ,3 ]
机构
[1] Xiangnan Univ, Acad Elect Informat & Elect Engn, Chenzhou 423000, Peoples R China
[2] South China Normal Univ, Sch Informat & Optoelect Sci & Technol, Guangzhou 510631, Peoples R China
[3] Hunan Normal Univ, Inst Phys & Informat Sci, Changsha 410081, Peoples R China
关键词
OUTPUT POWER; GAN; FILMS;
D O I
10.1088/1757-899X/758/1/012087
中图分类号
TU [建筑科学];
学科分类号
0813 ;
摘要
Blue light-emitting diodes (LEDs) with an InGaN multi-quantum well (MQW) structure were fabricated on cone-shaped patterned sapphire substrate (PSS) using a single growth process of metal organic chemical vapor deposition (MOCVD). The PSS was proved to be an efficient method to decrease the threading dislocation (TD) density in GaN epifilm with the lateral growth mode on PSS. The LED designed on PSS increased the electroluminescene (EL) intensity. The internal quantum efficiency is increased by reducing the dislocation density, and light extraction efficiency is also enhanced owing to PSS.
引用
收藏
页数:4
相关论文
共 50 条
  • [1] InGaN-based fight-emitting diodes grown on grooved sapphire substrates
    Wang, Wei-Kai
    Wuu, Don-Sing
    Lin, Shu-Hei
    Huang, Shih-Yung
    Horng, Ray-Hua
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 6, 2006, 3 (06): : 2141 - 2144
  • [2] Characteristics of InGaN-Based Light-Emitting Diodes on Patterned Sapphire Substrates with Various Pattern Heights
    Yu, Sheng-Fu
    Chang, Sheng-Po
    Chang, Shoou-Jinn
    Lin, Ray-Ming
    Wu, Hsin-Hung
    Hsu, Wen-Ching
    JOURNAL OF NANOMATERIALS, 2012, 2012
  • [3] Growth and characterization of InGaN-based light-emitting diodes on patterned sapphire substrates
    Wang, W. K.
    Wuu, D. S.
    Lin, S. H.
    Huang, S. Y.
    Wen, K. S.
    Horng, R. H.
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2008, 69 (2-3) : 714 - 718
  • [4] Light Output Enhancement of InGaN Light-Emitting Diodes Grown on Masklessly Etched Sapphire Substrates
    Lin, Hung-Cheng
    Lin, Ruo-Syuan
    Chyi, Jen-Inn
    Lee, Chia-Ming
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2008, 20 (17-20) : 1621 - 1623
  • [5] InGaN-based light-emitting diodes grown and fabricated on nanopatterned Si substrates
    Deng, Dongmei
    Yu, Naisen
    Wang, Yong
    Zou, Xinbo
    Kuo, Hao-Chung
    Chen, Peng
    Lau, Kei May
    APPLIED PHYSICS LETTERS, 2010, 96 (20)
  • [6] Fabrication of pyramidal patterned sapphire substrates for high-efficiency InGaN-based light emitting diodes
    Wuu, D. S.
    Wang, W. K.
    Wen, K. S.
    Huang, S. C.
    Lin, S. H.
    Horng, R. H.
    Yu, Y. S.
    Pan, M. H.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (08) : G765 - G770
  • [7] Characteristics of flip-chip InGaN-based light-emitting diodes on patterned sapphire substrates
    Wang, Wei-Kai
    Wuu, Dong-Sing
    Lin, Shu-Hei
    Huang, Shih-Yung
    Han, Pin
    Horng, Ray-Hua
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (4B): : 3430 - 3432
  • [8] InGaN-Based Light-Emitting Diodes Grown on a Micro/Nanoscale Hybrid Patterned Sapphire Substrate
    Ke, Wen-Cheng
    Lee, Fang-Wei
    Chiang, Chih-Yung
    Liang, Zhong-Yi
    Chen, Wei-Kuo
    Seong, Tae-Yeon
    ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (50) : 34520 - 34529
  • [9] InGaN-based 405 nm near-ultraviolet light emitting diodes on pillar patterned sapphire substrates
    Torma, Pekka T.
    Ali, Muhammad
    Svensk, Olli
    Suihkonen, Sami
    Sopanen, Markku
    Lipsanen, Harri
    Mulot, Mikael
    Odnoblyudov, Maxim A.
    Bougrov, Vladislav E.
    CRYSTENGCOMM, 2010, 12 (10): : 3152 - 3156
  • [10] InGaN-based blue light-emitting diodes grown on epitaxially laterally overgrown GaN substrates
    Mukai, T
    Takekawa, K
    Nakamura, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1998, 37 (7B): : L839 - L841