EUV large spectrum reflectometry for the metrology of optics

被引：7
|
作者：
Hecquet, Ch.
Roulliay, M.
Delmotte, F.
Ravet-Krill, M. F.
Hardouin, A.
Idir, M.
Zeitoun, Ph.
机构：
[1] Univ Paris Sud, CNRS, Lab Charles Fabry, Inst Opt, F-91128 Palaiseau, France
[2] Univ Paris 11, Lab Interact Rayonnement X Avec Mat, UMR 8624, CNRS, F-91405 Orsay, France
[3] Synchrotron SOLEIL Orme Merisiers, F-91192 Gif Sur Yvette, France
[4] Ecole Polytech, Lab Opt Appl, ENSTA, F-91761 Palaiseau, France
来源：
JOURNAL DE PHYSIQUE IV | 2006年 / 138卷
关键词：
D O I：
10.1051/jp4:2006138030
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：259 / 264
页数：6
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