Laser driven pulsed plasma CVD of carbon films from gas mixtures

被引：0
|
作者：
Ageev, VP
Konov, VI
Ugarov, MV
Uglov, SA
机构：
来源：
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1997年 / 61卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1375 / 1382
页数：8
相关论文
共 50 条
  • [31] Porous carbon film electrodes prepared by pulsed discharge plasma CVD
    Noda, Mikio
    Yukawa, Hiroyuki
    Matsushima, Masahiro
    Uchida, Hideo
    Umeno, Masayoshi
    DIAMOND AND RELATED MATERIALS, 2009, 18 (2-3) : 426 - 428
  • [32] Excimer laser induced crystallization of amorphous hydrogenated carbon-germanium films fabricated by plasma CVD
    Tyczkowski, J
    Kazimierski, P
    Hatanaka, Y
    Aoki, I
    SURFACE & COATINGS TECHNOLOGY, 2005, 200 (1-4): : 222 - 226
  • [33] CARBON-FILMS DEPOSITED FROM UV LASER PLASMA
    GORBUNOV, AA
    KONOV, VI
    SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3): : 503 - 508
  • [34] OPTICAL CHARACTERIZATION OF THIN SILICON FILMS DEPOSITED BY CVD AND ANNEALED BY PULSED LASER
    LAMPERT, MO
    PONPON, JP
    STUCK, R
    SIFFERT, P
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 63 (1-4): : 169 - 173
  • [35] Adhesion of Thin CVD Films on Pulsed Plasma Pre- Treated Polypropylene
    Behm, Henrik
    Bahroun, Karim
    Bahre, Hendrik
    Kirchheim, Dennis
    Mitschker, Felix
    Bibinov, Nikita
    Boeke, Marc
    Dahlmann, Rainer
    Awakowicz, Peter
    Hopmann, Christian
    Winter, Joerg
    PLASMA PROCESSES AND POLYMERS, 2014, 11 (05) : 418 - 425
  • [36] Effect of Helium gas on the deposition of diamond like carbon thin films by pulsed laser ablation
    Rusop, M
    Mominuzzaman, SM
    Soga, T
    Jimbo, T
    Umeno, M
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2002, 16 (6-7): : 871 - 875
  • [37] Carbon nitride thin films prepared by KrF pulsed excimer laser deposition in NO ambient gas
    Miyata, H
    Ohshima, T
    Ikegami, T
    Ebihara, K
    Thareja, RK
    CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST, 2001, : 42 - 43
  • [38] Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma enhanced CVD system: the effect of different gas mixtures
    Mao, M.
    Bogaerts, A.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (20)
  • [39] Plasma plume characteristics and properties of pulsed laser deposited diamond-like carbon films
    Haverkamp, J. (jdhaverk@eos.ncsu.edu), 1600, American Institute of Physics Inc. (93):
  • [40] Plasma plume characteristics and properties of pulsed laser deposited diamond-like carbon films
    Haverkamp, J
    Mayo, RM
    Bourham, MA
    Narayan, J
    Jin, C
    Duscher, G
    JOURNAL OF APPLIED PHYSICS, 2003, 93 (06) : 3627 - 3634
12345