Laser driven pulsed plasma CVD of carbon films from gas mixtures

被引：0
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作者：
Ageev, VP
Konov, VI
Ugarov, MV
Uglov, SA
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来源：
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1997年 / 61卷 / 07期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
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页码：1375 / 1382
页数：8
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