SIMULATION ANALYSIS OF HIGH FREQUENCY AND HIGH PRESSURE PIEZOELECTRIC MICRO-PUMP

被引：0
|
作者：
Ni, Jiafeng [1 ]
Xuan, Weipeng [1 ]
Li, Yilin [1 ]
Li, Wenjun [1 ]
Dong, Shurong [2 ,3 ,4 ]
Luo, Jikui [2 ,3 ,4 ]
机构：
[1] Hangzhou Dianzi Univ, Minist Educ, Key Lab RF Circuits & Syst, Coll Elect & Info, Hangzhou 310018, Peoples R China
[2] Zhejiang Univ, Key Lab Adv Micro Nano Elect Dev & Smart Sys Zhej, Coll Info Sci & Elect Engn, Hangzhou 310027, Peoples R China
[3] Zhejiang Univ, ZJU Hangzhou Global Sci & Technol Innovat Ctr, Hangzhou 310027, Peoples R China
[4] Zhejiang Univ, Int Joint Innovat Ctr, Haining 314400, Peoples R China
来源：
2022 16TH SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS, SPAWDA | 2022年
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
Pump valve integrated; Piezoelectric micro-pump; High pressure; High frequency;
D O I：
10.1109/SPAWDA56268.2022.10046021
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, a piezoelectric micro-pump with integrated valve based on synthetic jet structure is proposed. The piezoelectric micro-pump possesses a size of about 16mm*16mm*3mm, which works at the first-order resonant frequency of 11649Hz. With the rectangular wave driving signal has the amplitude of 24V, the average output flow of the piezoelectric micro-pump is about 139.5 mL /min. The maximum output pressure can reach more than 30 kPa. Compared with the existing piezoelectric pump, it has the advantages of high-pressure retention and small size, indicating a potential application in wearable device such as smart pressure watch.
引用
收藏
页码：468 / 472
页数：5
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